University of Illinois Urbana-Champaign

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Thumbnail for Field-Directed Sputter Sharpening for Tailored Probe Materials and Atomic-Scale Lithography
Field-Directed Sputter Sharpening for Tailored Probe Materials and Atomic-Scale Lithography
Schmucker, Scott W.; Kumar, Navneet; Abelson, John R.; Daly, Scott R.; Girolami, Gregory S.; Bischof, Maia R.; Jaeger, David L.; Reidy, Rick F.; Gorman, Brian P.; Alexander, Justin; Ballard, Josh B.; Randall, John N.; Lyding, Joseph W.