University of Illinois Urbana-Champaign

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Thumbnail for Micromachined inductors and capacitors.
Micromachined inductors and capacitors.
Zou, Jun; Chen, Jack; Liu, Chang

Thumbnail for access: v.18, no.03, Fall 2005
access: v.18, no.03, Fall 2005
National Center for Supercomputing Applications (NCSA)