University of Illinois Urbana-Champaign

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Showing 31–60 of 201 items
Thumbnail for Multitarget Sputtering Using Decoupled Plasma
Multitarget Sputtering Using Decoupled Plasma
Wickersham, C.E.; Greene, J.E.

Thumbnail for Reproductibility and Frequency Tuning
Reproductibility and Frequency Tuning
Sakamoto, Nathan Tadayoshi