Multitarget Sputtering Using Decoupled Plasma

Wickersham, C.E.; Greene, J.E.

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https://hdl.handle.net/2142/73954 Copy

Description

Title

Multitarget Sputtering Using Decoupled Plasma

Author(s)

• Wickersham, C.E.
• Greene, J.E.

Issue Date

1976-04

Keyword(s)

• Semiconductors
• Sputtering
• Thin films

Publisher

Coordinated Science Laboratory, University of Illinois at Urbana-Champaign

Series/Report Name or Number

Coordinated Science Laboratory Report no. UILU-ENG 76-2214, R-726

Type of Resource

text

Language

English

Permalink

http://hdl.handle.net/2142/73954

Sponsor(s)/Grant Number(s)

Joint Services Electronics Program / DAAB-07-72-C-0259

Owning Collections