The kinetics of the chemical vapor deposition of germanium onto quartz substrates

Permalink

https://hdl.handle.net/2142/93843

Title: The kinetics of the chemical vapor deposition of germanium onto quartz substrates
Author(s): Henry, Brian Erik
Issue Date: 1987
Discipline: Chemical Engineering
Degree Name: B.S. (bachelor's)
Degree Level: Thesis
Keyword(s): Chemical engineering
Language: eng
Type of Resource: text
Permalink: http://hdl.handle.net/2142/93843