Development of antenna-coupled metal-insulator-metal diodes for infrared detection
Winoto, Ardy
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https://hdl.handle.net/2142/88202
Description
Title
Development of antenna-coupled metal-insulator-metal diodes for infrared detection
Author(s)
Winoto, Ardy
Issue Date
2015-07-17
Director of Research (if dissertation) or Advisor (if thesis)
Feng, Milton
Department of Study
Electrical & Computer Engineering
Discipline
Electrical & Computer Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
infrared (IR) detector
metal-insulator-metal (MIM) diode
Abstract
The long-wavelength infrared (LWIR) band between 7 and 14 µm is significant for thermal imaging purposes because it coincides with the blackbody radiation peak of the human body and a low absorption window in the earth’s atmosphere. Also, at 10 µm wavelength, the earth’s terrestrial radiation is maximized and provides a good opportunity for untapped energy harvesting. These two factors combine to make a very strong need for a low-cost detector that operates at room temperature in this band. Antenna-coupled metal-insulator-metal (ACMIM) diodes are a leading candidate due to their high speed and potential manufacturability on Si substrates. In this work, Ni-NiO-Ni ACMIM diodes are fabricated using a two-step lithography process and an oxygen plasma oxidation. The device is characterized to both have current in the nA range and responsivities nearing 1000pA/W.
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