Plasma-Material Interactions: A Langmuir Probe Analysis of a Cylindrical SiO(2) Deposition System and a Computational Study Using VFTRIM3D
Turkot, Robert Bruce, Jr
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https://hdl.handle.net/2142/85931
Description
Title
Plasma-Material Interactions: A Langmuir Probe Analysis of a Cylindrical SiO(2) Deposition System and a Computational Study Using VFTRIM3D
Author(s)
Turkot, Robert Bruce, Jr
Issue Date
1997
Doctoral Committee Chair(s)
Ruzic, David N.
Department of Study
Nuclear Engineering
Discipline
Nuclear Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
The $\rm SiO\sb2$ films deposited in this system are analyzed for their gas permeation qualities and are correlated to the plasma properties gathered using Langmuir probes as well as the gas, pressure, and time recipes used to produce them. It is found in this work that the application of $\rm SiO\sb2$ films onto flexible PET bottles using the fashion explained herein results in a decrease in the gas permeation characteristics of the $\rm SiO\sb2$-PET membrane as desired, but is found to be independent of the thickness of the $\rm SiO\sb2$ present. This limit is found to be caused by cracks and pinhole defects across the $\rm SiO\sb2$ film that permit uninhibited gas flow directly to the PET bottle.
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