Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications
Neumann, Martin John
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https://hdl.handle.net/2142/85914
Description
Title
Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications
Author(s)
Neumann, Martin John
Issue Date
2007
Doctoral Committee Chair(s)
Ruzic, David N.
Department of Study
Nuclear Engineering
Discipline
Nuclear Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Physics, Fluid and Plasma
Language
eng
Abstract
The simultaneous process of deposition, evaporation, and sputtering of lithium was modeled and corroborated with experimental observations such that no net deposition on the collector optic was measured and showed the model to being a viable option that can be used for predictive scenarios involving deposition, evaporation, and sputtering are undertaken.
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