Modeling of Wave Heated Discharges Used in Plasma Processing Reactors
Kinder Oxom, Ronald Leonel
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https://hdl.handle.net/2142/85890
Description
Title
Modeling of Wave Heated Discharges Used in Plasma Processing Reactors
Author(s)
Kinder Oxom, Ronald Leonel
Issue Date
2001
Doctoral Committee Chair(s)
Kushner, Mark J.
Department of Study
Nuclear Engineering
Discipline
Nuclear Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Nuclear
Language
eng
Abstract
Asymmetric antennas (m = +1,-1) produce 3-D components of the electric field lacking any significant symmetries and so must be fully resolved in 3-D. To investigate these processes, a 3-D plasma equipment model was improved to resolve 3-D components of the electric field produced by m = + 1,-1 antennas in solenoidal magnetic fields. For magnetic fields of 10--600 G, rotation of the electric field was observed downstream of the antenna where significant power deposition also occurs.
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