Failure of Microelectromechanical Systems Under Dynamic Loading: An Experimental and Numerical Investigation
Kimberley, Jamie
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https://hdl.handle.net/2142/85111
Description
Title
Failure of Microelectromechanical Systems Under Dynamic Loading: An Experimental and Numerical Investigation
Author(s)
Kimberley, Jamie
Issue Date
2008
Doctoral Committee Chair(s)
Lambros, John
Department of Study
Aerospace Engineering
Discipline
Aerospace Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
The response of cantilever beams, representing modle test structures, comprised of metal and ceramic layers was also investigated. Experiments were conducted using the modified split hopkinson pressure bar to investigate the effects of loading amplitude, duration, and profile on the failure of the cantilever beams. Finite element simulations of these beams were conducted to provide more detailed information regarding the deformation of the beams under the various loadings applied in the experiments. Results of the simulations were coupled with experimental measurements of failure stress (measured in quasistatic microtensile tests) in an attempt to predict failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading.
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