Failure and Fracture of Thin Film Materials for MEMS
Jonnalagadda, Krishna Nagasai
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https://hdl.handle.net/2142/85109
Description
Title
Failure and Fracture of Thin Film Materials for MEMS
Author(s)
Jonnalagadda, Krishna Nagasai
Issue Date
2008
Doctoral Committee Chair(s)
Chasiotis, Ioannis
Department of Study
Aerospace Engineering
Discipline
Aerospace Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Aerospace
Language
eng
Abstract
The results of this research provided fundamental information about thin film failure at the scale of MEMS, which could be directly applied to perform materials selection and design of MEMS components. The experimental methods described in this thesis were shown to be entirely repeatable and directly applicable to any thin film material. Consequently, they represent a protocol with the potential to become a standardized technique for mechanical property studies at the micron and the nanometer scales.
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