University of Illinois Urbana-Champaign

Solution-Based Deposition of Ultrathin Metal Oxide Films on Metal and Superconductor Surfaces

Westwood, Glenn

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Description

Title
Solution-Based Deposition of Ultrathin Metal Oxide Films on Metal and Superconductor Surfaces
Author(s)
Westwood, Glenn
Issue Date
2004
Doctoral Committee Chair(s)
Walter G. Kemperer
Department of Study
Chemistry
Discipline
Chemistry
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Physics, Condensed Matter
Language
eng
Abstract
Solution deposition from Zr4(OPrn) 16 was also used to deposit ultrathin zirconia films on gold, silver, and aluminum surfaces. X-ray photoelectron spectroscopy and atomic force microscopy were used to compare the physical properties of these films. Electrical measurements showed that zirconia films on Ag and Au are not insulating, but aluminum-zirconia-aluminum capacitors fabricated by this method displayed capacitance densities between 0.09 tauo 0.50 muF/cm2 (tan delta = 0.09 to 1.12) and current densities between 10-2 to 10-4 A/cm2.
Graduation Semester
2004
Type of Resource
text
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http://hdl.handle.net/2142/84164

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