Stochastic Modeling of Micro-Electromechanical Systems (Mems)
Agarwal, Nitin
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https://hdl.handle.net/2142/83935
Description
Title
Stochastic Modeling of Micro-Electromechanical Systems (Mems)
Author(s)
Agarwal, Nitin
Issue Date
2009
Doctoral Committee Chair(s)
Aluru, Narayana R.
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
In the final part, a data-driven stochastic collocation approach is presented, which seeks to characterize uncertain input parameters based on available experimental information. This approach models the uncertain parameters as independent random variables, for which the distributions are estimated based on experimental observations, using a nonparametric diffusion mixing based estimator. The efficiency and applicability of the developed stochastic modeling framework is demonstrated by simulating several MEMS devices, such as MEMS switches, resonators, comb-drives etc.
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