Fabrication, Characterization, and Transport Analysis of Silicon-Based Microsystems: Micro Fuel Cells and Micro Gas Perconcentrators
Yeom, Junghoon
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https://hdl.handle.net/2142/83904
Description
Title
Fabrication, Characterization, and Transport Analysis of Silicon-Based Microsystems: Micro Fuel Cells and Micro Gas Perconcentrators
Author(s)
Yeom, Junghoon
Issue Date
2007
Doctoral Committee Chair(s)
Shannon, Mark A.
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Chemical
Language
eng
Abstract
Second, we have developed a muGPC that helps gas detectors sniff a trace amount of toxic vapors by increasing their concentration via adsorption and thermal desorption. Integration with electrostatic microvalves enabled the muGPC to achieve extremely small dead volumes and fast injection times while the power and energy required to run a microheater, a key component of the muGPC, were kept small. Another unique feature of the muGPC is the use of an array of microposts coated with thin metal-organic framework adsorbents permitting a small pressure drop across the chamber while maintaining a large surface-area-to-volume ratio. The optimization of designing the muGPC is discussed in the context of maximizing the preconcentration factor while minimizing the energy required for operation.
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