Collocation Based Meshless Methods for Microelectromechanical Systems
Jin, Xiaozhong
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Permalink
https://hdl.handle.net/2142/83885
Description
Title
Collocation Based Meshless Methods for Microelectromechanical Systems
Author(s)
Jin, Xiaozhong
Issue Date
2007
Doctoral Committee Chair(s)
Aluru, N.R.
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
After the theoretical study of the meshless methods, the FCM and boundary cloud method (BCM) were applied to solve the fluid flow in the MEMS devices. Combining the fluid flow module with the solver for the Poisson and Nernst-Planck (PNP) equations, a tool for the simulation of ion transport in the framework of the meshless methods has been developed. Furthermore, this tool has been used to study the electrokinetic transport in a hybrid micro-nanofluidic interconnect device, which is capable of controlling analyte transfer between the microchannels through a nanochannel under rest, injection and recovery stages of operation by varying the applied potential bias. During the injection stage, the phenomenon of ion accumulation and depletion is observed at the micro-nano interface region. Net volume charge in the depletion region gives rise to nonlinear electrokinetic transport during the recovery stage due to induced pressure, induced electroosmotic flow of the second kind and complex flow circulations. Analytical expressions derived for ion current variation are in agreement with the simulated results. In the presence of multiple accumulation or depletion regions, a hybrid micro-nano device can be designed to function as a logic gate.
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