Nonlinear Dynamics of Electrostatically and Magnetically Actuated MEMS
De, Sudipto K.
This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.
Permalink
https://hdl.handle.net/2142/83855
Description
Title
Nonlinear Dynamics of Electrostatically and Magnetically Actuated MEMS
Author(s)
De, Sudipto K.
Issue Date
2006
Doctoral Committee Chair(s)
Aluru, N.R.
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
"The multi-physical nature of microelectromechanical Systems (MEMS) makes the development of CAD tools for MEMS a challenging area. Besides, the non-linear coupling between the different physical domains in MEMS can give rise to interesting non-linear dynamic properties. These non-linear dynamic/chaotic properties of MEMS can be exploited for various applications like chaotic micro-fluidic mixers, secure communications, MEMS filters with shiftable resonant frequencies, etc. In this work, we have developed an efficient physical level simulation tool, namely, the full-Lagrangian Newton/Relaxation scheme, for the static and dynamic analysis of two popular classes of MEMS devices, namely, electrostatic and magnetostatic MEMS. This new scheme has several advantages of conventional MEMS simulation tools in terms of speed and convergence rates. The simulation tool is used to explore new nonlinear dynamic properties of electrostatic MEMS devices in this work. Complex nonlinear oscillations and the period doubling route to chaos are observed under superharmonic excitations. The presence of U-sequence in MEMS is reported for the first time. Under superharmonic excitation, the sequence is found to be a modified form of the U-sequence termed as ""UM-sequence"". The effect of these complex oscillations on thermoelastic damping (an inherent dissipation mechanism that limits the quality factor of these devices) in electrostatic MEMS is also studied."
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
