A Novel Method for Testing Freestanding Nanofilms Using a Custom MEMS Load Cell
Leseman, Zayd Chad
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https://hdl.handle.net/2142/83849
Description
Title
A Novel Method for Testing Freestanding Nanofilms Using a Custom MEMS Load Cell
Author(s)
Leseman, Zayd Chad
Issue Date
2006
Doctoral Committee Chair(s)
Mackin, Thomas J.
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
Following fabrication, membrane thickness was measured using several methods, including: profilimetry, Scanning Electron Microscopy, and custom spectrophotometry. The mechanical properties of several membranes were measured using the apparatus, including membranes of gold, single crystal silicon, and nano-porous silicon. The elastic properties of both the gold and silicon agree with previous measurements. Interesting new behavior for each material was also observed, including a surface energy driven creep relaxation in gold membranes.
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