Scanning Probe Array Development for Dip Pen Nanolithography
Bullen, David Andrew
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Permalink
https://hdl.handle.net/2142/83822
Description
Title
Scanning Probe Array Development for Dip Pen Nanolithography
Author(s)
Bullen, David Andrew
Issue Date
2004
Doctoral Committee Chair(s)
Chang Liu
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
Out of five array concepts attempted, three are practical and were demonstrated using lithography. Several packaging schemes were developed and used to install the arrays in AFMs modified for multi-probe applications. The arrays were used to write patterns of 1-octadecanethiol on gold surfaces with line widths as small as 25nm, write speeds as fast as 20mum/sec, and up to four patterns overlapping the same region.
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