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https://hdl.handle.net/2142/83792
Description
Title
Optical Actuation of MEMS Devices
Author(s)
Sulfridge, Marc Allen
Issue Date
2003
Doctoral Committee Chair(s)
Taher Saif
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses at a power level slightly above the toggle threshold reliably toggled the beam every time, short duration pulses of the same power toggled the beam only about two thirds of the time. In addition, when excessively high power levels (far above the toggle threshold) were used, the device would not reliably toggle regardless of the pulse duration. In order to shed light on this unexpected behavior, a new, nonlinear dynamic analysis of the bistable beam device used in those experiments is presented. This model explains the anomalies, and extensive experimental evidence supporting the validity of the model is also presented.
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