Theory, Fabrication and Characterization of Micromachined Electrolytic Solution Conductivity Sensors
He, Dongming
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https://hdl.handle.net/2142/83753
Description
Title
Theory, Fabrication and Characterization of Micromachined Electrolytic Solution Conductivity Sensors
Author(s)
He, Dongming
Issue Date
2001
Doctoral Committee Chair(s)
Shannon, Mark A.
Department of Study
Mechanical Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Mechanical
Language
eng
Abstract
Thin-film nickel RTD has a thickness dependent temperature coefficient that is lower than the bulk material due to free electron boundary scattering. Four-wire resistance measurements are used to eliminate the effect of lead resistance for the RTD fabricated on the probe tip. The RTD integrated on the probe tip achieved an accuracy of +/-0.5% from 0 to 100°C with a parabolic correlation. A 200 mum probe gave a thermal resistance of 553°C/W during self-heating in water. With a RTD integrated on the sensor tip, temperature correction for conductivity can be made so that concentration could be measured locally in media with non-uniform temperature and concentration distributions. Finally, challenges to reduce the microprobe tip size further are discussed with respect to fabrication, measurement, and the underlying physics.
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