Additive Fabrication of Microstructures Using Self-Assembled Organic Thin-Film Templates
Jeon, Noo Li
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https://hdl.handle.net/2142/82876
Description
Title
Additive Fabrication of Microstructures Using Self-Assembled Organic Thin-Film Templates
Author(s)
Jeon, Noo Li
Issue Date
1997
Doctoral Committee Chair(s)
Ralpha G. Nuzzo
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
A simple multilayered device, a ferroelectric capacitor with platinum/PZT/platinum layers, was fabricated using the patterning methods developed in this thesis. This achievement demonstrates the possibility of developing a photolithography-free method for fabricating micron-scale metal-oxide-silicon devices based on printed organic thin films of self-assembled monolayers. With further development, the patterning of metal and ceramic thin films directed by SAMs appears to have a great potential in fabricating the three-dimensional thin film structures needed for advanced device technologies.
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