Dewetting and Stress Evolution in Thin Films During Ion Irradiation
Zhao, Kai
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https://hdl.handle.net/2142/82832
Description
Title
Dewetting and Stress Evolution in Thin Films During Ion Irradiation
Author(s)
Zhao, Kai
Issue Date
2008
Doctoral Committee Chair(s)
Averback, Robert
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
This project studies the morphology evolution of non-wetting metal films on a substrate during ion irradiation. It reveals that the mobility of the solid atoms is significantly improved during irradiation and the non-wetting films can dewet as if they are melted. The ion induced dewetting process can result into patterned nanoscale structures by self-organization. This project also investigates the stress evolution in thin films when they're bombarded with ∼1keV ions. Processes such as vacancy creation and phase transformation play important roles in the stress accumulation of the films. Meanwhile, it is discovered that atoms can be injected into deeper region from the ion bombarded layer during irradiation, inducing a compressive stress generation process. It is also noticed that despite the variance in their microstructures, the films show many common features in stress development during ion irradiation.
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