Advanced Soft Lithography and Microstructured Semiconductors (mus-Sc) for Macroelectronics
Lee, Keon Jae
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https://hdl.handle.net/2142/82780
Description
Title
Advanced Soft Lithography and Microstructured Semiconductors (mus-Sc) for Macroelectronics
Author(s)
Lee, Keon Jae
Issue Date
2006
Doctoral Committee Chair(s)
Nuzzo, Ralph G.
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
Another main focus of my research is macroelectronics, referred to flexible and large area electronics. We employed newly developed technology from our group, called microstructured semiconductor (mus-Sc) that carved from bulk single crystal wafer using the standard microfabrication process. Soft lithographic approach was used to print this form of mus-Sc onto plastic substrate and it overcame many current limitations of the flexible electronics. High performance mus-Sc devices using both single crystal Si and GaN materials were successfully fabricated on plastic substrate.
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