In Situ High-Temperature Scanning Tunneling Microscopy Studies of Early Stage Growth Kinetics During Titanium Nitride Epitaxy
Kodambaka, Suneel Kumar
This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.
Permalink
https://hdl.handle.net/2142/82731
Description
Title
In Situ High-Temperature Scanning Tunneling Microscopy Studies of Early Stage Growth Kinetics During Titanium Nitride Epitaxy
Author(s)
Kodambaka, Suneel Kumar
Issue Date
2002
Doctoral Committee Chair(s)
Greene, Joseph E.
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
During the course of my research, I have developed methods to grow atomically-smooth TiN(001) and (111) single-crystal layers with simple well-defined single-atom-high 2D island configurations on large atomically-smooth terraces. I used in situ scanning tunneling microscopy to study time- and temperature-dependent 2D island coarsening/decay kinetics, obtain 2D equilibrium island shapes, and follow temporal fluctuations of island shapes on both TiN(001) and (111) surfaces. I have developed a combination of experimental and theoretical techniques to analyze the surface dynamics measurements and determined adatom surface transport parameters, step energies, step stiffnesses, and kink formation energies on TiN(001) and TiN(111) surfaces.
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
