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https://hdl.handle.net/2142/82726
Description
Title
Ion Implantation Damage in Solids
Author(s)
Zhong, Yuncheng
Issue Date
2002
Doctoral Committee Chair(s)
Averback, Robert S.
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
Ion induced surface smoothing and roughening processes were studied using Molecular Dynamics (MD) computer simulation. The simulations on self-ion bombarded W showed the effect of the surface on defect production and the roughening of the surface. The simulations on the CuTi, Ag and Ni with amorphous and crystalline states reveal the smoothing and roughening process due to a single ion impact.
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