Synthesis, Microstructural Evolution, and Properties of Polycrystalline and Epitaxial Metastable Titanium Tungsten Nitride Alloy Layers
Tian, Fang
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https://hdl.handle.net/2142/82724
Description
Title
Synthesis, Microstructural Evolution, and Properties of Polycrystalline and Epitaxial Metastable Titanium Tungsten Nitride Alloy Layers
Author(s)
Tian, Fang
Issue Date
2002
Doctoral Committee Chair(s)
Greene, Joseph E.
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
Epitaxial TiN/Ti0.53W0.47N superlattices with periods Lambda ranging from 16 to 205 A were also grown on MgO(001) substrates at 600°C. The superlattices were single crystals exhibiting coherent interfaces and nearly fully strained. All samples showed metallic behavior while resistivities decrease with period Lambda, reaching the level expected for bulk parallel layers at Lambda ≥ 70 A. TCR decreased with Lambda but remained positive. Tc is 7.8 K at Lambda = 16 A, decreasing to 5.4 K at Lambda = 205 A.
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