Crystallization of Isolated Amorphous Zones in Semiconductors
Hollar, Eric Prater
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https://hdl.handle.net/2142/82704
Description
Title
Crystallization of Isolated Amorphous Zones in Semiconductors
Author(s)
Hollar, Eric Prater
Issue Date
2001
Doctoral Committee Chair(s)
Robertson, Ian M.
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
Software was developed to detect, measure and track individual amorphous zones throughout a series of irradiation micrographs. Characteristic zone shrinkage behaviors were observed. A simple shrinkage model suggests that the defects responsible for regrowth are created very near the crystalline/amorphous interface. In the sub-threshold electron energy regime, crystallization is thought to be initiated by an electronic excitation which creates a dangling bond pair. By migrating along the crystalline/amorphous interface these dangling bonds are capable of reconstructing to the crystal a large number of atoms through a mechanism similar to that for thermally activated solid phase epitaxial growth.
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