Queueing Network Analysis of Semiconductor Manufacturing Plants
Morrison, James Robert Barrett
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Permalink
https://hdl.handle.net/2142/81356
Description
Title
Queueing Network Analysis of Semiconductor Manufacturing Plants
Author(s)
Morrison, James Robert Barrett
Issue Date
2000
Doctoral Committee Chair(s)
Kumar, P.R.
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, System Science
Language
eng
Abstract
We show how the performance bounds can be used to design wafer fabs. Specifically, one may formulate the problem as one of maximizing the performance subject to a capital cost constraint. Software has been developed both for performance bounds (called BoundFab) and for design (called DesignFab).
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