The Monolithic Integration of Enhancement- and Depletion-Mode High Electron Mobility Transistors for Low-Power and High-Speed Circuit Applications in the Lattice -Matched Indium Phosphide Material System
Mahajan, Aaditya
This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.
Permalink
https://hdl.handle.net/2142/81295
Description
Title
The Monolithic Integration of Enhancement- and Depletion-Mode High Electron Mobility Transistors for Low-Power and High-Speed Circuit Applications in the Lattice -Matched Indium Phosphide Material System
Author(s)
Mahajan, Aaditya
Issue Date
1999
Doctoral Committee Chair(s)
Adesida, Ilesanmi
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
By using a buried-Pt process in conjunction with proper heterostructure design, a procedure for the fabrication of enhancement-mode HEMTs (E-HEMTs) has been developed. Following the full characterization of E-HEMT devices, a heterostructure was then designed for the monolithic integration of E-HEMTs and D-HEMTs, using a two-level etch-stop process. Devices were successfully fabricated and characterized which showed the viability of a directcoupled FET logic (DCFL) circuit technology in the InP material system. To demonstrate the feasibility of this technology, DCFL ring oscillators were fabricated and tested. These circuits successfully demonstrated high-speed, low-power performance while utilizing only a single voltage supply.
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
