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https://hdl.handle.net/2142/81262
Description
Title
Microdischarge Devices Fabricated in Silicon
Author(s)
Frame, James Warren
Issue Date
1998
Doctoral Committee Chair(s)
DeTemple, Thomas A.
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
The second portion of this research examined the fabrication and characterization of a device fabrication using ultrasonic milling, the microdischarge. The current-voltage characteristics and spectra of the devices were recorded. Operation of microdischarge devices in the excimer species XeI, XeO, and I 2 was investigated. Arrays of microdischarge devices were fabricated and tested using a new geometry and biasing scheme.
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