Transport and Agglomeration of Dust Contaminant Particles in Reactive Ion Etch Reactors
Huang, Frederick Yi-Kai
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https://hdl.handle.net/2142/81209
Description
Title
Transport and Agglomeration of Dust Contaminant Particles in Reactive Ion Etch Reactors
Author(s)
Huang, Frederick Yi-Kai
Issue Date
1997
Doctoral Committee Chair(s)
Kushner, M.J.
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Physics, Fluid and Plasma
Language
eng
Abstract
The morphology of the agglomerates formed was also found to be dependent on plasma conditions. Agglomerates generally grow either in a diffusive or ballistic manner. Neutral gas flow in the reactor has been found to be a useful means of controlling contamination. Higher flow rates can sweep dust particles away from sensitive areas of the reactor before they reach the surfaces.
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