Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination
Hwang, Helen H.
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https://hdl.handle.net/2142/81185
Description
Title
Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination
Author(s)
Hwang, Helen H.
Issue Date
1997
Doctoral Committee Chair(s)
Kushner, M.J.
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
Particle transport is also affected by Coulomb interactions between particles. Experimental observations showed that in trapping sites particles form clouds and move collectively. We numerically investigated Coulomb interactions between particles. In rf discharges, ordered systems (Coulomb liquids or solids) occur at low particle temperatures. Dislocations in lattices result because of impurities of differently sized particles due to the disparity in particle charges. Waves may be induced by impacting a Coulomb solid with energetic particles. Repeated impacts can liquify the lattice if the particles do not dissipate enough energy as a result of fluid drag effects or Coulomb collisions.
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