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https://hdl.handle.net/2142/80901
Description
Title
Micromachined, Out-of-Plane Micro Flow Sensors
Author(s)
Chen, Jack
Issue Date
2005
Doctoral Committee Chair(s)
Chang Liu
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
In addition, we use the fabrication platform to integrate 8 sensor array with on-chip signal conditioning using a commercial operational amplifier circuit. A new method to make the sensor array flexible is also proposed.
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