Microelectromechanical Systems (Mems) for Radio Frequency Applications
Zou, Jun
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Permalink
https://hdl.handle.net/2142/80774
Description
Title
Microelectromechanical Systems (Mems) for Radio Frequency Applications
Author(s)
Zou, Jun
Issue Date
2002
Doctoral Committee Chair(s)
Chang Liu
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
The work in this thesis focuses on the development of two of the most fundamental on-chip RF passive devices (tunable capacitors and inductors) using micromachining technology. First, a new wide-tuning-range tunable capacitor design is proposed and prototype devices are fabricated using surface micromachining technology. This new tunable capacitor has the advantages of simple configuration, IC-compatible fabrication process, low loss, and wide tuning range. Second, a novel three-dimensional (3-D) microstructure assembly technique, Plastic Deformation Magnetic Assembly (PDMA), is developed, which is compatible with the standard IC fabrication process and capable of addressing batch-scale assembly with high yield and good controllability. Using PDMA, on-chip vertical spiral inductors are demonstrated. Vertical spiral inductors have almost zero footprints and have much higher quality factors and self-resonance frequencies than their horizontal counterparts due to reduced substrate loss and parasitics. On-chip solenoid inductors with different windings are also demonstrated using PDMA.
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