Simulation of Rarefied Flows in MEMS Devices by Atomistic and Multiscale Methods
Aktas, Ozgur
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https://hdl.handle.net/2142/80746
Description
Title
Simulation of Rarefied Flows in MEMS Devices by Atomistic and Multiscale Methods
Author(s)
Aktas, Ozgur
Issue Date
2001
Doctoral Committee Chair(s)
Narayan Aluru
Ravaioli, Umberto
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
To reduce to computational cost associated with such analysis, multiscale coupling of DSMC with the continuum models for fluid flow is studied. The Schwarz alternating method is utilized for coupling, and the continuum equations are solved using the finite cloud method. The agreement of the coupled method with DSMC is shown and the dependence of the convergence of the DSMC/Stokes coupling on the overlap, DSMC noise, and the number of DSMC time steps is investigated. Significant computational time savings are demonstrated with the coupled method. The coupling of DSMC with compressible Navier-Stokes equations is also developed. It is shown that by using DSMC/Navier-Stokes coupling, the computational time savings can be increased. The agreement of the results of DSMC/Navier-Stokes coupling with DSMC is shown for pressure, velocity and temperature.
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