Modeling and Simulation of Integrated Microstructures and Systems
Chen, Jinghong
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https://hdl.handle.net/2142/80705
Description
Title
Modeling and Simulation of Integrated Microstructures and Systems
Author(s)
Chen, Jinghong
Issue Date
2001
Doctoral Committee Chair(s)
Kang, Sung-Mo (Steve)
Department of Study
Electrical Engineering
Discipline
Electrical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Electronics and Electrical
Language
eng
Abstract
To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.
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