Stochastic Space-Charge in Projection Electron Lithography and High Resolution Transmission Electron Microscopy
Schwartz, Adam Micah
This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.
Permalink
https://hdl.handle.net/2142/80654
Description
Title
Stochastic Space-Charge in Projection Electron Lithography and High Resolution Transmission Electron Microscopy
Author(s)
Schwartz, Adam Micah
Issue Date
1998
Doctoral Committee Chair(s)
Gibson, J. Murray
Department of Study
Physics
Discipline
Physics
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Physics, Condensed Matter
Language
eng
Abstract
The effects of space-charge have been investigated for the past half-century; the longevity of this research stems from the difficulty of the problem and from the technological advances which have availed new opportunities in which to study the phenomena. This thesis investigates a specific effect, the degradation in image resolution, as observed in two advanced technologies: SCattering with Angular Limitation Projection Electron Lithography (SCALPEL) and High-Resolution Transmission Electron Microscopy (HRTEM). These particular technologies were chosen for their technological relevance and their distinct mechanisms of image formation--SCALPEL exploits amplitude contrast while HRTEM exploits phase contrast. To provide insights into the occurring space-charge physics in both technologies, this thesis uses analytical modeling, Monte Carlo simulations and experimental techniques. Using these techniques, an approximation based on the nearest neighbor (NN) is developed, and its applicability to each system is presented. The NN predictions are compared to existing theories. Furthermore, design considerations and fundamental limitations for each technique are discussed. Lastly, future research directions are suggested.
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
