Creation of Surface and Bulk Defects of Germanium and Surface Roughening of Germanium During High Energy Ion Irradiation
Kim, Jaichan
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https://hdl.handle.net/2142/80477
Description
Title
Creation of Surface and Bulk Defects of Germanium and Surface Roughening of Germanium During High Energy Ion Irradiation
Author(s)
Kim, Jaichan
Issue Date
2001
Doctoral Committee Chair(s)
David Cahill
Department of Study
Physics
Discipline
Physics
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Language
eng
Abstract
Surface patterns of valleys and mounds are observed at 250°C and 275°C due to the asymmetric kinetics of surface vacancies at step edges, while no surface pattern formation is observed at room temperature. Also, model of Politi and Villain agrees relatively well with the roughening and coarsening of the Ge(111) surfaces etched by 5 keV Xe ions at 250°C and 275°C. At 300°C, a surface pattern is observed only when the incident ion direction is parallel to the step direction; this surface pattern is the ripple morphology produced by curvature dependent sputtering yield.
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