A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry

Yang, Zining

Permalink

https://hdl.handle.net/2142/79022 Copy

Description

Title

A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry

Author(s)

Yang, Zining

Issue Date

2014-12-12

Committee Member(s)

Kim, Seok

Department of Study

Mechanical Sci & Engineering

Discipline

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• transfer printing
• micro-masonry
• microassembly
• microscanner
• micromirror

Abstract

This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated.

Graduation Semester

2014-12

Type of Resource

text

Permalink

• http://hdl.handle.net/123456789/4019
• http://hdl.handle.net/2142/79022

Copyright and License Information

Copyright 2014 Zining Yang

Owning Collections