University of Illinois Urbana-Champaign

Large Scale Transfer of Graphene onto Silicon Surface under Ultra High Vacuum Conditions

Wang, Tianyu

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https://hdl.handle.net/2142/79005

Description

Title
Large Scale Transfer of Graphene onto Silicon Surface under Ultra High Vacuum Conditions
Author(s)
Wang, Tianyu
Contributor(s)
Lyding, Joseph W.
Issue Date
2015-05
Keyword(s)
  • large scale transfer of graphine
  • properties of graphine-silicon interface
Abstract
The goal of this research is to achieve large scale transfer of graphene onto a clean silicon surface to enable study of the properties of graphene-silicon interface. The transfer is done in a vacuum chamber to ensure a clean silicon surface. Conventional dry transfer methods and self-release transfer by sublimation are tested. A transfer feature size of ~20μm is achieved utilizing copper phthalocyanine (CuPc) and polyethylene terephthalate (PET) under room condition. Transfer in vacuum was ruined by residue from PET, more experiments are still in progress.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/79005

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