Measurement and model of a radio frequency microelectromechanical switch
Handler, Drew E
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https://hdl.handle.net/2142/78364
Description
Title
Measurement and model of a radio frequency microelectromechanical switch
Author(s)
Handler, Drew E
Issue Date
2015-04-13
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
microelectromechanical systems (MEMS)
radio frequency (RF)
S-parameter
Abstract
A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. One potential application of this process is a radio frequency (RF) MEMS switch. This thesis provides an overview of the measurement and modeling techniques used to verify the functionality of an RF MEMS switch that was fabricated using this process. This thesis confirms that this specific RF MEMS design was not fully functioning, but can still be measured, characterized, and modeled.
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