Silicon microplasma devices as real-time sensors of bulk plasma
Choi, Dong San
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https://hdl.handle.net/2142/72813
Description
Title
Silicon microplasma devices as real-time sensors of bulk plasma
Author(s)
Choi, Dong San
Issue Date
2015-01-21
Director of Research (if dissertation) or Advisor (if thesis)
Eden, James G.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
microplasma
silicon microcavity device
photodetection
Abstract
Silicon microcavity devices have been demonstrated to exhibit photodetection capabilities. This thesis explores the possibility of using silicon microcavity devices as passive photodetectors for bulk plasma to serve as a diagnostic tool. The voltage-current characteristics of the device show that there is an interesting phenomenon that needs to be replicated with different types of devices to confirm what is occurring during operation. The discussion provides further insight on possible explanations for the voltage-current characteristics.
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