Computational Design of Interference Lithography for the Fabrication of Three-Dimensional Microstructures
Rinne, James William
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https://hdl.handle.net/2142/72166
Description
Title
Computational Design of Interference Lithography for the Fabrication of Three-Dimensional Microstructures
Author(s)
Rinne, James William
Issue Date
2009
Doctoral Committee Chair(s)
Wiltzius, Pierre
Department of Study
Materials Science and Engineering
Discipline
Materials Science and Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Abstract
The fabrication of three-dimensional periodic (3D) micro- and nano-structures has become increasingly important to various fields in science and technology. This has been especially true for the field of photonic crystals (PCs): the study of artificially structured materials that manipulate light through their periodicity. The benefits obtained from creating tailored structures at these length-scales have fueled a growing effort to fabricate them. An important class of 3D microfabrication techniques, called interference lithography (IL), enables a wide variety of periodic microstructures through optical means. The focus of this work has been to develop and experimentally validate a computational approach to the design of IL experiments.
To this end, genetic algorithms have been applied to two different IL techniques, holographic lithography (HL) and diffraction-based lithography (DL). For HL the relevant optical parameters (intensity, polarization, etc.) were optimized to produce a diamond structure, known for its large photonic band gap (PBG). Various HL designs targeting diamond were achieved, including one with a PBG of 28%. For DL, a grating's surface relief was optimized along with the incident radiation again yielding diamond structures. Related efforts produced gratings for fabricating periodic helices, a structure with many potential applications in photonics. These computational designs took on a variety of forms and often brandished a complexity uncharacteristic of other design methodologies. The versatility inherent to this approach enabled the exploration of untapped design spaces, which was then used to enhance the experimental viability of IL.
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