The Growth of Copper - Chromium Metastable Alloys by Bias Sputtering: Effect of Substrate Bias and Alloy Composition on Solubility and Morphology
Shin, Sang Mo
This item is only available for download by members of the University of Illinois community. Students, faculty, and staff at the U of I may log in with your NetID and password to view the item. If you are trying to access an Illinois-restricted dissertation or thesis, you can request a copy through your library's Inter-Library Loan office or purchase a copy directly from ProQuest.
Permalink
https://hdl.handle.net/2142/71843
Description
Title
The Growth of Copper - Chromium Metastable Alloys by Bias Sputtering: Effect of Substrate Bias and Alloy Composition on Solubility and Morphology
Author(s)
Shin, Sang Mo
Issue Date
1987
Department of Study
Metallurgy and Mining Engineering
Discipline
Metallurgical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Keyword(s)
Engineering, Materials Science
Abstract
Cu-Cr metastable alloys are interesting both from a basic science viewpoint (i.e., alloy theory for elements with very limited mutual liquid and solid solubilities) and from a technological viewpoint (i.e., "stainless" copper for corrosion and thin film circuit fabrications). Single phase Cu-Cr metastable alloys have been successfully grown by bias rf sputtering. The effect of substrate bias and film composition on the early stages of film growth, on the film microstructure and morphology, and on the phase transformation process of the metastable films were studied using (S)TEM, SEM, AES, SIMS, ISS, WDX, X-ray diffraction, and resistivity measurements. The solid solubilities at room temperature were extended from less than 0.04 atomic percent to as much as 45 atomic percent. Cu-rich films were FCC and Cr-rich films were BCC. The lattice parameters of these films showed Vegard's law behaviour. Increase in substrate bias and in temperature caused preferential sputtering and evaporation of solute atoms, resulting in reduction of solubility and formation of two phases. The morphology and microstructures depended on film composition and very sensitively on substrate bias. Finally, a metastable phase map, a morphology model, and a growth rate model as functions of substrate bias and film composition were proposed. The map and the models could be used to predict how processing variables will affect the film's optical, electrical, mechanical and corrosive properties.
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
