Flexible and foldable single-crystalline silicon electronics for various applications
Lee, Yu Ri
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https://hdl.handle.net/2142/50408
Description
Title
Flexible and foldable single-crystalline silicon electronics for various applications
Author(s)
Lee, Yu Ri
Issue Date
2014-09-16
Director of Research (if dissertation) or Advisor (if thesis)
Rogers, John A.
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Keyword(s)
Ultrathin Stretchable Photovoltaic (PV) with Light Trapping Structure
Printed Assemblies of Ultrathin Single Crystalline Silicon for Strain Sensor Applications
High Density Capacitive Neural Interfaces
Abstract
Much of the existing research in flexible electronic systems based on silicon has focused on improving performance and cost. We are developing soft materials and assembly approaches that enable electronic devices with area coverage, conformal electronics, mechanical properties, or geometrical form features that would be impossible to achieve using traditional, wafer-based technologies. This thesis presents the fabrications of three different ultrathin silicon electronic systems: ultrathin stretchable silicon solar cells, ultrathin strain sensors, and high density neural sensors for mapping brain activity. First, we designed ∼3 μm thick bars of ultrathin silicon PV that include a light trapping structure to maximize light absorption. Next, we modeled strain sensors based on piezoresistivity that offer high sensitivity, lightweight construction, and mechanical flexibility so that they can be used in various applications, including structural health monitoring, tactile image detection, cardiovascular pressure measurement, and many others. Finally, we developed new devices that integrate ultrathin flexible silicon nanomembrane transistors to test neural sensing from significant areas of the brain at high spatial and temporal resolution.
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