Pyroelectric emission from PbZr20Ti80O3 emitter coupled on silicon heater

Choi, Jangho

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https://hdl.handle.net/2142/49396 Copy

Description

Title

Pyroelectric emission from PbZr20Ti80O3 emitter coupled on silicon heater

Author(s)

Choi, Jangho

Issue Date

2014-05-30T16:41:58Z

Director of Research (if dissertation) or Advisor (if thesis)

King, William P.

Department of Study

Mechanical Sci & Engineering

Discipline

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

M.S.

Degree Level

Thesis

Keyword(s)

• Pyroelectricity
• Electron emission
• Lead zirconate titanate
• Electric fields
• Pyroelectric effects
• Silicon heater
• MicroElectroMechanical systems

Abstract

This thesis reports pyroelectric emission from high frequency epitaxial 60 nm thick PbZr20Ti80O3 (PZT) film emitters coupled on silicon heater. The silicon heater is designed for generating joule heating on heater regions using low dosage ion implantation, while bridging electric connection on leg areas from high doped silicon. Sharp nano-meter scale tip arrays are fabricated to concentrate electrons on surface asperity and reduce external electric field for electron emission. 250nm thick platinum metal line on the device is connected to electric supply to apply heating voltage on the device. The measurements using Raman spectroscopy and oscilloscope shows that the fabricated device heats up 120 °C from room temperature in 10ms, whose average heating rate is 8850 °C/s. With high heating rate, pyroelectric emission occurs in a 6.7 V/µm external electric field. Pyroelectric heating effect is shown in a followed cooling period, and generates more emission current with faster heating conditions. This thesis also presents simulation results that 886 nm thick pyroelectric films are capable of electrons tunneling into vacuum without external electric field.

Graduation Semester

2014-05

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http://hdl.handle.net/2142/49396

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Copyright 2014 Jangho Choi

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