University of Illinois Urbana-Champaign

Microplasma Characteristics of Various Cavity Structures on Glass Substrates

Kang, Young Mo

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https://hdl.handle.net/2142/47079

Description

Title
Microplasma Characteristics of Various Cavity Structures on Glass Substrates
Author(s)
Kang, Young Mo
Contributor(s)
  • Sung, Seung Hoon
  • Eden, James G.
  • Park, Sung-Jin
Issue Date
2008-05
Keyword(s)
  • plasma devices
  • microcavity plasma
  • plasma device fabrication
Abstract
Microcavity plasma devices using glass substrates will be discussed. The cavities formed on glass substrate sustain very high operation voltage over 7 kV p-p and provide long lifetime due to its dielectric characteristics. The fabrication of the micro-scale cavities is achieved by micropowder blasting techniques, which provide high throughput and low cost. Plasma is generated in the microcavities ranging from 100 μm to 1000 μm, and the characteristics of different structures with emphasis on cavity size, dielectric thickness, and electrode spacing will be studied. The data will be used to find a practical structure with lower turn on voltage and brighter light emission.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/47079

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