University of Illinois Urbana-Champaign

Comparison of Replica-Molded Microplasma Devices as Chemical Reactors with Ar and CS2 in AR

Ma, Jeffrey Hans

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https://hdl.handle.net/2142/47064

Description

Title
Comparison of Replica-Molded Microplasma Devices as Chemical Reactors with Ar and CS2 in AR
Author(s)
Ma, Jeffrey Hans
Contributor(s)
  • Park, Sung-Jin
  • Eden, Gary
Issue Date
2008-12
Keyword(s)
  • plasma reactors
  • plasma devices
  • microplasmas
  • microplasma cavity devices
Abstract
This paper compares two similar microplasma chemical reactors. These optically transparent devices were fabricated using glass and plastic substrates. The dielectric barrier discharge (DBD) plasma is generated using an AC current across two electrodes spanning a cavity about 100 μm apart. The reaction of interest is the decay of gaseous CS2 molecules in an Ar microplasma. Using images taken by an optical microscope in addition to spectrums taken using Fourier transform infrared spectroscopy, we were able to show the formation micro structures deposited on the surfaces of the microplasma cavity.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/47064

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