University of Illinois Urbana-Champaign

Printed Integrated Circuits and Strain Sensor Array on Plastic Substrate for Structural Health Monitoring System

Kim, Young Hwa

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https://hdl.handle.net/2142/47041

Description

Title
Printed Integrated Circuits and Strain Sensor Array on Plastic Substrate for Structural Health Monitoring System
Author(s)
Kim, Young Hwa
Contributor(s)
  • Rogers, John A.
  • Kim, Hoonsik
Issue Date
2009-05
Keyword(s)
  • flexible electronics
  • sensors
  • strain sensors
  • thin-film transistors
  • health monitoring
Abstract
In this thesis, we present a single crystalline silicon-based flexible strain sensor with integrated multiplexing thin-film transistors (TFTs). In this system, thin (260 nm) single crystalline silicon membranes are transferred from the donor substrate and printed onto a polyimide substrate using a polydimethylsiloxane (PDMS) stamp, and both strain sensor cells and TFTs are fabricated on the printed silicon membrane. Due to high piezoresistive coefficients of single crystalline silicon, our strain sensor cell exhibits gauge factors that are orders of magnitude higher than those of conventional metal foil strain sensor making it suitable for numerous applications such as a large-area structural health monitor.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/47041

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