University of Illinois Urbana-Champaign

Performance of a Ferroelectric Microcavity Plasma Device

Houlahan, Thomas

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https://hdl.handle.net/2142/47029

Description

Title
Performance of a Ferroelectric Microcavity Plasma Device
Author(s)
Houlahan, Thomas
Contributor(s)
  • Eden, J. Gary
  • Park, Sung-Jin
Issue Date
2009-05
Keyword(s)
  • plasma devices
  • microcavity plasmas
  • ferroelectric substrate
Abstract
The creation of non-equilibrium plasmas in cavities with a micron-scale characteristic dimension has been heavily studied in the past decade. Generating plasma in such small cavities allows for near-atmospheric operating pressures and very high power-loading. The operating characteristics of a microcavity plasma array are dependent upon many factors, including the choice of a substrate material, within which the plasma is excited and contained. This paper introduces a new substrate material, Pb[ZxTi1-x]O3 (PZT) on the basis that its ferroelectric properties will enhance the field applied to the cavities and lead to low turn-on voltages for the microcavity plasma arrays.
Type of Resource
text
Language
en
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http://hdl.handle.net/2142/47029

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